作者：曹鹏飞, 禹静, 尹健龙, 沈小燕, 李东升
作者单位：中国计量大学计量测试工程学院，浙江 杭州 310018
关键词：气体静压节流器;多微通道式;阶跃响应测试;动静态特性
摘要：
针对采用外部激励法研究气体静压节流器的响应特性时存在实验设计复杂、动态参数难以计算等问题，设计新的阶跃响应测试来分析气体静压节流器的动静态特性。采用多微通道式气体静压节流器作为研究对象，设计测试方案对空载时的多微通道式气体静压节流器在垂直方向上的阶跃响应进行测量，通过时域分析法分析其性能参数。测试结果表明：多微通道式气体静压节流器-气膜系统为二阶系统，且阻尼振荡频率随着输入气压的增大而增大；根据节流器-气膜系统的动力学模型和阶跃响应函数，进一步得到气膜的阻尼系数和静刚度，且其阻尼系数和静刚度随输入气压的增大而增大。该阶跃响应测试方法能有效分析多微通道式气体静压节流器的固有频率、阻尼比等性能参数，对节流器结构的设计起指导作用。
Research on step response characteristics of multi-microchannel aerostatic restrictor
CAO Pengfei, YU Jing, YIN Jianlong, SHEN Xiaoyan, LI Dongsheng
College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China
Abstract: When the external excitation method is used to study the response characteristics of aerostatic restrictor, there are problems such as complicated experimental design and difficult calculation of dynamic parameters, so a new step response test is designed to analyze the dynamic and static characteristics of aerostatic restrictor. Using multi-microchannel aerostatic restrictor as the research object, and designing the test plan to measure the step response of multi-microchannel aerostatic restrictor in the vertical direction at no load, and using time domain analysis method to analyze its performance parameters. The test results showed: multi-microchannel aerostatic restrictor-gas film system was a second-order system, and the damping oscillation frequency increased with the increase of the input gas pressure; Through the dynamic model and step response function of the restrictor-gas film system, the damping coefficient and static stiffness of the gas film were further obtained, and the damping coefficient and static stiffness increased with the increase of the input gas pressure. This step response test method can effectively analyze the natural frequency, damping ratio and other performance parameters of the multi-microchannel gas static pressure restrictor, and can guide the design of the restrictor structure.
Keywords: aerostatic restrictor;multi-microchannel;step response test;dynamic and static characteristics
2021, 47(2):156-163 收稿日期: 2020-05-26;收到修改稿日期: 2020-06-28
基金项目: 国家自然科学基金（51775529）；浙江省自然科学基金（LY19E050002）
作者简介: 曹鹏飞(1994-),男,浙江杭州市人,硕士研究生,专业方向为超精密测量技术
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