作者：郭亚鑫, 张爱梅

作者单位：郑州大学，河南 郑州 450001

关键词：表面织构;光谱共焦技术;三维形貌;稳健高斯回归滤波;移动最小二乘法

摘要：

为实现缸套内表面微织构形貌的在线检测，设计一种非接触式测量系统。采用基于EtherCAT通信协议开发的伺服系统，通过高精度伺服电机带动光谱共焦位移传感器，一次采集多个微织构的不同截面轮廓，经特征提取与坐标变换，形成单个织构的三维点云数据。通过光强值出现局部极小值确定边缘位置，采用稳健高斯回归滤波方法滤除误差，使用移动最小二乘法拟合曲面，最终获得微织构的精准三维形貌。试验结果表明：该系统与超景深显微镜测得的直径最大差值为5.7 µm，深度最大差值为0.45 µm，具有较高的重复性和精度，可作为缸套内表面微织构形貌在线检测的一种手段。

Research on on-line measurement method of inner surface micro texture of cylinder liner based on spectral confocal
GUO Yaxin, ZHANG Aimei
Zhengzhou University, Zhengzhou 450001, China
Abstract: In order to realize the on-line detection of inner surface micro texture of cylinder liner, a non-contact measurement system is designed. The system adopts a servo system based on EtherCAT communication protocol to drive the spectral confocal displacement sensor through a high-precision servo motor. The sensor collects the contours of different sections of multiple micro textures at a time, and a three-dimensional point cloud data of a single texture is formed through feature extraction and coordinate transformation. The edge position is determined by the local minimum of light intensity, the error is filtered by the robust Gaussian regression filtering method, and the moving least square method is used to fit the surface, and finally the accurate three-dimensional morphology of micro texture is obtained. The experimental results show that the maximum difference between the diameter measured by the system and that measured by the super depth of field microscope is 5.7 μm. The maximum difference in depth is 0.45 μm. Thus the system has high repeatability and precision, and can be used as a means of on-line detection of inner surface micro texture of cylinder liner.
Keywords: surface texture;spectral confocal technology;three-dimensional morphology;robust Gaussian regression filtering;moving least square method
2024, 50(4):187-193  收稿日期: 2022-04-27;收到修改稿日期: 2022-06-12
基金项目:
作者简介: 郭亚鑫(1995-),男,河南郑州市人,硕士研究生,专业方向为数据可视化与智能设计。
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