作者：王贺^1,2, 潘奕捷², 王柏淞^2,3, 王欣¹, 杨苏辉¹

作者单位：1. 北京理工大学光电学院，北京 100081;
2. 中国计量科学研究院，北京 100029;
3. 北京信息科技大学仪器科学与光电工程学院，北京 100192

关键词：多普勒展宽测温;温度控制;均匀性;稳定性;不确定度

摘要：

玻尔兹曼常量的定值和温度基本单位开尔文的重新定义将使国际协议温标向热力学温标融合过渡。基于铯原子直接吸收光谱的多普勒展宽测温可实现实用、芯片级热力学温度测量，其实验原理验证依赖高准确度的控温环境。该文搭建面向室温验证范围的恒温腔体，利用制冷循环水浴提供基础温度，使用自研PID程序调控比例-积分控制参数，输出电压动态改变加热功率，采用接触电加热方式实现精确温度调节与稳定。结果表明：在25 ℃实验条件下，该系统温度均匀性小于8 mK，12 h内稳定性优于0.2 mK，整体控温标准不确定度11.02 mK（k=1）。研究为实现芯片级、在线免校准的热力学温度传感器实验验证奠定一定的基础。

Research on accurate temperature control system in Doppler broadening thermometry verification experiment
WANG He^1,2, PAN Yijie², WANG Bosong^2,3, WANG Xin¹, YANG Suhui¹
1. School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China;
2. National Institute of Metrology, China, Beijing 100029, China;
3. School of Instrument Science and Opto Electronics Engineering, Beijing Information Science & Technology University, Beijing 100192, China
Abstract: The definite definition of the Boltzmann constant and the basic unit of temperature Kelvin will allow the international protocol temperature scale to transition to the thermodynamic temperature scale fusion. The Doppler broadening thermometry based on the direct absorption spectrum of helium atoms can realize practical and chip-level thermodynamic temperature measurement. The experimental principle verification relies on high accuracy temperature control environment. This study builds a constant temperature chamber for the room temperature verification range, uses the refrigeration cycle water bath to provide the base temperature, uses the self-developed PID program to control the proportional-integral control parameters, the output voltage dynamically changes the heating power, and uses the contact electric heating method to achieve precise temperature regulation and stability. The experimental results show that under the condition of 25 ℃, the temperature uniformity of the system is less than 8 mK, the stability within 12 h is better than 0.2 mK, and the overall temperature standard uncertainty is 11.02 mK (k=1). The research laid the foundation for the experimental verification of the thermodynamic temperature sensor for chip-level and online calibration-free calibration.
Keywords: Doppler broadening thermometry;temperature control;uniformity;stability;uncertainty
2020, 46(8):9-14  收稿日期: 2019-07-24;收到修改稿日期: 2019-10-02
基金项目: 国家重点研发项目资助(2017YFF0206102)
作者简介: 王贺(1994-)，男，吉林长春市人，硕士研究生，专业方向为温度计量
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