作者：曹惠, 林美玉

作者单位：复旦大学先进材料实验室, 上海 200438

关键词：场发射扫描电镜; 介孔硅; 制样方法; 基底;

摘要：

为研究不同制样方法对导电性较差样品的扫描电镜图片的影响,以介孔硅材料为研究对象,采用场发射扫描电镜(FESEM),分别比较介孔硅粉末样品、溶液样品和薄膜样品在不同制样条件下的FESEM图片。结果表明:当扫描电镜测试参数完全相同时,介孔硅粉末样品在导电基底(液体银导电胶或碳导电胶带)上分散较好时可获得高质量的电镜图片;介孔硅球溶液样品制备在铜网上时,可消除荷电现象;对于连续的介孔硅薄膜样品,基底对扫描电镜图片质量的影响不大。因此,对样品前处理过程进行优化,不仅可获得高质量的扫描电镜图片,而且为实验结果的真实性提供有力保证。

Impact of sample preparation conditions on mesoporous silica SEM images

CAO Hui, LIN Mei-yu

Advanced Materials Laboratory, Fudan University, Shanghai 200438, China

Abstract: In order to study the impact of different sample preparation methods on the field emission scanning electron microscopy (FESEM) images of the sample with poor conductivity, FESEM images of mesoporous silica powder, solution and film samples at different preparation conditions were compared. The results showed that as the test parameters were identical, SEM images with high quality could be realized as mesoporous silica powder dispersed well on the conductive substrate (liquid silver conductive adhesive or carbon conductive tape). The charging phenomenon could be eliminated as mesoporous silica spheres solution sample was prepared on the carbon-coated copper grid. For the continuous mesoporous silica thin film samples, the substrate had little effect on the quality of SEM images. Therefore, high-quality scanning electron microscope images and a strong authenticity of the experimental results could be realized based on the optimization of the sample preparation process.

Keywords: field emission scanning electron microscope; mesoporous silica; preparation method; substrate

2014, 40(6): 38-41  收稿日期: 2014-5-24;收到修改稿日期: 2014-7-29

基金项目: 

作者简介: 曹惠(1981-),女,江苏连云港市人,工程师,博士,主要从事电子显微镜检测及维护工作。

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