作者：顾宝龙1,2, 赵振平1,2, 陈浩远1,2, 闫旭1,2, 陈佳璧1,2, 郭子昂1,2
作者单位：1. 中航工业上海航空测控技术研究所, 上海 201601;
2. 故障诊断与健康管理技术航空科技重点实验室, 上海 201601
关键词：铌酸锂晶体;压电式加速度传感器;优化设计;耐高温;可靠性
摘要：
设计一种耐高温、高稳定性、高可靠性的加速度传感器，针对航空发动机高温恶劣的振动测试环境，传感器选用高居里温度的铌酸锂晶体作为压电元件，整体采用剪切式结构，利用特征系数最大的压电晶体切型，确定特征系数最大的压电晶体切向，以获得铌酸锂晶体较强的压电效应。研制双层铠装高温低噪声电缆，采用高温合金及矿物绝缘等耐高温材料，可在高温环境下长期使用，有效解决传感器小信号高温传输可靠性问题。优化设计传感器结构、封装工艺和测量系统，传感器频响、动态协议性能大为改善。通过对传感器的频率和温度响应、电容损耗等试验表明该传感器在550℃高温环境下能够保持高的可靠性和稳定性，提升航空发动机振动测试的技术能力。
Design of high-temperature piezoelectric acceleration sensor based lithium niobate
GU Baolong1,2, ZHAO Zhenping1,2, CHEN Haoyuan1,2, YAN Xu1,2, CHEN Jiabi1,2, GUO Ziang1,2
1. Shanghai Aero Measurement & Control Technology Research Institute, Aviation Industry Corporation of China, Shanghai 201601, China;
2. Key Laboratory of Aviation Technology for Fault Diagnosis and Health Management Research, Shanghai 201601, China
Abstract: This paper aims to develop and design a high-temperature resistant acceleration sensor with excellent stability and reliability. Considering the harsh and high-temperature environment of aero-engine vibration test, the sensor employs lithum niobate crystal with high Curie temperature as the piezoelectric element and adopts a shear-type configuration. The cutting pattern and direction of piezoelectric crystal that allow for the maximum characteristic coefficient are utilized and identified to obtain a strong piezoelectric effect for the lithium niobate crystal. Besides, a double-layer armoured high-temperature and low-noise cable is also developed using high-temperature alloy, mineral-insulated and other heat-resisting materials, which can be used in high-temperature environment for a long time, addressing effectively the reliability problem of small signals transmitted by sensor at high temperatures. Sensor structure, packaging technology and measuring system are also optimized and designed, which improves the frequency response and dynamic protocol performance of the sensor significantly. The testing on frequency and temperature response as well as capacitance loss of the sensor shows that it can maintain high reliability and stability at a high temperature of 550℃, improving the technical capacity of aero-engine vibration test effectively.
Keywords: lithium niobate;piezoelectric acceleration sensor;optimal design;high temperature resistant;reliability
2017, 43(11): 74-78 收稿日期: 2016-08-10;收到修改稿日期: 2016-10-23
基金项目:
作者简介: 顾宝龙(1965-),男,上海市人,高级工程师,研究方向为传感器研发及航空特种测试技术。
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