作者：吴丽雄1, 黄玉珠2
作者单位：1. 广东省湛江市质量计量监督检测所, 广东 湛江 524022;
2. 河南省计量科学研究院, 河南 郑州 450008
关键词：位置传感器; 线性度实验; 非线性度误差
摘要：
介绍了日本HAMAMASTU公司改进表面分流型二维光电位置传感器的工作原理及专用信号处理电路,指出其仍存在位置检测误差比较大的显著缺点。作者沿传感器高度和水平Y两个方向在Ф5mm内对该传感器线性度进行了大量实验研究,实验结果表明,该传感器的线性度性能A区要明显好于B区,应用时如能控制在A区,将具有较高的测量精度,其非线性度误差可达到1%。
Study on the improved 2-dimensional PSD and its linearity
WU Li-xiong1, HUANG Yu-zhu2
1. Zhanjiang Institute of Supervision and Test on Quality and Measure, Zhanjiang 524022, China;
2. Henan Institute of Metrology, Zhengzhou 450008, China
Abstract: This paper introduced the principle and signal processing circuit of tetra-lateral 2-dimensional Position Sensitive Detector by HAMAMASTU Co.of Japan and pointed out its the remarkable defect of large position detect error.The author made a lot of experiments on the PSD linearity along its Y direction of height and level within Ф5mm.The experiments show that the linear property in area A is obviously better than in area B.If the application of the PSD can be controlled in aero A,a higher test precision will be achieved and the linearity can be reduced to less than 1%.
Keywords: Position sensitive detector; Linearity experiment; Linearity error
2006, 32(2): 142-144 收稿日期: 2005-6-3;收到修改稿日期: 2005-8-11
基金项目:
作者简介: 吴丽雄(1968-),女,工程师,主要从事计量测试工作。
参考文献
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