作者：雷强¹, 高杨^2,3, 王雄⁴

作者单位：1. 西南科技大学信息工程学院, 四川 绵阳 621010;
2. 中国工程物理研究院电子工程研究所, 四川 绵阳 621999;
3. 核探测与核电子学国家重点实验室(中国科学院高能物理研究所), 北京 100049;
4. 中国空气动力研究与发展中心, 四川 绵阳 621000

关键词：MEMS;传感器;剪切应力;湍流测量

摘要：

壁面剪切应力的时间特性是用于反映单个动量运输过程中非稳态结构的一个测量参数，也是湍流中相干位点的一个表征方法，是一个重要的壁面湍流的物理量。目前，主要基于近壁或壁面处的平均速度梯度和换热率与壁面切应力成正比的基础上对MEMS壁面剪切应力开展研究。因此，对MEMS壁面剪切应力传感器进行综述。根据不同的测量方式，MEMS剪切应力传感器主要分为直接测量和间接测量两种类型。对每种测量方法的原理、研究现状、优点和限制进行分析。MEMS技术使得剪切应力传感器取得显著的进步，提高空间和时间分辨率，以及测量结果的准确度。但MEMS剪切应力传感器还需要进一步发展，并且量化测量中的不确定度，才能成为一种可靠的剪切应力测量技术。最后，对未来MEMS剪切应力传感器的发展方向进行总结。

The development progress of MEMS wall shear stress sensors

LEI Qiang¹, GAO Yang^2,3, WANG Xiong⁴

1. School of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, China;
2. Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China;
3. State Key Laboratory of Particle Detection and Electronics, Institute of High Energy Physics, CAS, Beijing 100049, China;
4. China Aerodynamics Research and Development Center, Mianyang 621000, China

Abstract: Time characteristic of wall shear stress, not only a measurement parameter used to reflect unsteady structure during individual momentum transport in flow state, but also a characterization method of corresponding points in turbulence, is an important physical indicatorfor wall turbulence. At present, the research on MEMS wall shear stress is mainly based on the fact thatmean velocity gradient and heat transfer rate near the wall or on wall surface is proportional to the wall shear stress on wall surface. So this paper summarizes the MEMS wall shear stress sensor. MEMS shear stress sensors are divided into direct measurement and indirect measurement types according to the different ways of measurement. The principles, research status, advantages and limitations of each measurement method have also been analyzed. The wall shear stress sensors have made a significant progress via MEMS technology, which improved the spatial and temporal resolution. However, MEMS shear stress sensors need further development, and it's uncertainty should be quantified in order to become a reliable shear stress measurement technology. Finally, the future development directions of the MEMS shear stress sensors are summarized.

Keywords: MEMS;sensors;shear stress;tubulence measurement

2016, 42(7): 1-8  收稿日期: 2016-2-10;收到修改稿日期: 2016-3-13

基金项目: 国家自然科学基金（61574131）；中国工程物理研究院超精密加工技术重点实验室基金（2014ZA001）；核探测与核电子学国家重点实验室开放课题基金（2016KF02）；西南科学大学特殊环境机器人技术四川省重点实验室开放基金（14zxtk01）；中国工程物理研究院电子工程研究所创新基金（S20141203）；西南科技大学研究生创新基金（16ycx103）

作者简介: 雷强(1992-),男,四川绵阳市人,硕士研究生,专业方向为微电子机械系统。

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