作者：陈倩栎1, Konrad Herrmann2, Febo Menelao2
作者单位：1. 东南大学材料科学与工程学院, 江苏南京 211189;
2. 德国联邦物理技术研究院, 德国布伦瑞克 381116
关键词：薄膜; 弹性模量; 纳米压痕技术; 激光超声
摘要：
在薄膜材料的力学性能测定中,弹性模量是衡量材料软硬程度的重要指标。为了测定弹性模量,本文选取不同种类和厚度的金属薄膜材料,采用纳米压痕技术(nanoindentation)和激光超声技术(laser-acoustics)两种测试方法相互比较,以确保测试的准确性。两种方法在膜厚较大的试样测试中得到了大致相符的试验结果,相对误差最小达到2%。
Comparative study about the determination of the Young's modulus of thin layers with the instrumented indentation test and the laser-acoustic measuring method
CHEN Qian-li1, Konrad Herrmann2, Febo Menelao2
1. School of Materials Science and Engineering, Southeast University, Nanjing 211189, China;
2. Physikalisch-Technische Bundesanstalt, Braunschweig 38116, Germany
Abstract: For the characterization of the mechanical properties of thin films the Young's modulus plays an important role. In order to state the accuracy of the corresponding measurements and further to increase their accuracy, two methods are compared with a set of layer materials:the nanoindentation test and the laser-acoustic measuring method. The results from the laser-acoustic measuring method fits properly with that of nanoindentation test.
Keywords: Thin layers; Young's modulus; Nanoindentation test; laser-acoustic method
2007, 33(1): 77-81 收稿日期: 2006-9-27;收到修改稿日期: 2006-11-19
基金项目: 德意志学术交流中心资助;德国联邦物理技术研究院设备支持
作者简介:
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