作者：张敏刚¹, 胡君杰¹, 熊可¹, 潘义², 王少楠³, 范挺⁴, 周理^5,6, 谷雨¹, 周玉龙¹, 许向东¹

作者单位：1. 电子科技大学光电科学与工程学院 电子薄膜与集成器件国家重点实验室，四川 成都 610054;
2. 中国测试技术研究院，四川 成都 610021;
3. 西南化工研究设计院有限公司，四川 成都 610225;
4. 中国科学院成都有机化学研究所，四川 成都 610041;
5. 中国石油西南油气田分公司天然气研究院，四川 成都 610213;
6. 中国石油天然气质量控制和能量计量重点实验室，四川 成都 610213

关键词：微型热导检测器;热导池;灵敏度;综述

摘要：

热导检测器是气相色谱仪的关键部件，主要用于气体成分和浓度的检测。与传统热导检测器相比较，微型热导检测器（μTCD）具有质量轻、体积小、灵敏度高等优点，能够集成到便携式气相色谱仪中，符合当前气相色谱仪微型化的发展趋势。该文系统概括μTCD的研究理论，从优化μTCD性能的角度，详细比较4种典型的μTCD的结构及其制备方法，并且基于μTCD热导池的封装技术，对其发展趋势进行展望。分析结果表明，当μTCD的热导池热丝支撑梁采用Si/SiN_x复合结构时，输出信号可靠，检测灵敏度高。另外，与静电键合技术相比较，新型低温封装技术能够在室温条件下进行，更有利于检测到稳定的输出信号。

Research progress of micro-thermal conductivity detectors
ZHANG Mingang¹, HU Junjie¹, XIONG Ke¹, PAN Yi², WANG Shaonan³, FAN Ting⁴, ZHOU Li^5,6, GU Yu¹, ZHOU Yulong¹, XU Xiangdong¹
1. State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Photoelectric Science and Engineering, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, China;
2. National Institute of Measurement and Testing Technology, Chengdu 610021, China;
3. Southwest Research and Design Institute of Chemical Industry Co., Ltd., Chengdu 610225, China;
4. Chengdu Institute of Organic Chemistry, Chinese Academy of Sciences, Chengdu 610041, China;
5. Research Institute of Natural Gas Technology of PetroChina Southwest Oil and Gasfield Company, Chengdu 610213, China;
6. Key Laboratory of Natural Gas Quality Control and Energy Measurement, CNPC, Chengdu 610213, China
Abstract: Micro-thermal conductivity detectors (μTCDs) which are mainly used to measure the gas compositions and concentrations are the key components of gas chromatographic systems. Compared with the traditional thermal conductivity detectors, μTCDs exhibit the advantages of lighter weight, smaller volume, and higher sensitivity, which can be integrated into a portable instrument, such as a miniaturized gas chromatography. Recent results about μTCDs are reviewed in this paper. Firstly, the theoretical bases of the μTCDs are presented. Secondly, the structures and prepartion methods of four kinds of μTCDs are summarized. Particularly, the output signal stability and detection sensitivity of the μTCDs are significantly improved when thermal sensitive materials support beams are fabricated by Si/SiN_x films. In addition, the bonding techniques for the top layer of the μTCDs are described. The analysis results indicate that the novel polydimethylsiloxane films instead of glasses were used to seal μTCDs at the room temperature with the good sealing effect. Finally, the trends in the development of μTCDs are discussed.
Keywords: micro-thermal conductivity detectors;thermal conductivity cells;sensitivity;review
2020, 46(8):1-8  收稿日期: 2019-12-11;收到修改稿日期: 2020-03-17
基金项目: 国家自然科学基金项目(61377063，61421002)；四川省科技重大专项(2018TZDZX0008)
作者简介: 张敏刚（1995-），男，甘肃平凉市人，博士研究生，主要从事光电传感器的应用研究工作
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