作者：王国星1, 马冲2
作者单位：1. 中北大学机电工程学院, 山西太原 030051;
2. 中国计量科学研究院, 北京 100013
关键词：激光计量; 激光光束质量; 激光波前; 哈特曼传感器; 自适应光学
摘要：
激光波前分布作为ISO新列入的衡量激光光束质量的重要参数,对其有效、准确地测量显得十分重要。根据哈特曼波前测量原理,详细介绍了基于哈特曼传感器的激光波前分布测量装置、哈特曼传感器波前斜率测量方法和常用波前重构算法,引入一种定标哈特曼传感器针孔阵列与CCD间距的方法,分析定标实验数据及使用已定标的哈特曼波前分析仪测量波前的实验结果。实验证明定标方法可靠有效。
Measurement of laser beam wavefront distribution based on hartmann sensor
WANG Guo-xing1, MA Chong2
1. School of Mechatronical Engineering, North University of China, Taiyuan 030051, China;
2. National Institute of Metrology, Beijing 100013, China
Abstract: It is essential to accurately measure the laser beam wavefront distribution,which is a key parameter listed by ISO to characterize the laser beam propagation properties. The paper specified the methods for measuring the laser beam wavefront distribution with Hartmann sensor, which includes measurement equipment, test principle of wavefront slope and wavefront reconstruction algorithm. Furthermore,a method to determine the distance between pinholes array and CCD in the Hartmann sensor was introduced,and the wavefront measurement results using the calibrated Hartmann sensor are analyzed. The experiment results indicate that the method to determine the distance between pinholes array and CCD is credible and accurate.
Keywords: laser metrology; laser beam quality; laser beam wavefront; hartmann sensor; adaptive optics
2012, 38(5): 22-24 收稿日期: 2012-4-23;收到修改稿日期: 2012-6-16
基金项目: 国家科技部科技支撑计划项目(2006BAF06B05)
作者简介: 王国星(1990-),男,山西太原市人,硕士研究生,专业方向为激光测量技术。
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